منابع مشابه
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A wide variety of gas phase ions with kinetic energies from 1–10 eV increasingly are being used for the growth and modification of state-of-the-art material interfaces. Ions can be used to deposit thin films; expose fresh interfaces by sputtering; grow mixed interface layers from ions, ambient neutrals, and/or surface atoms; modify the phases of interfaces; dope trace elements into interface re...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1983
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-27-13